Measuring range available when set to "No extra-fine wire measurement"or "Edge specification" in the basic setup mode.
Environment for accuracy validation: 20ºC 1ºC temperature; 50% 10% humidity.
The value of 2 o with a 2mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation.
The value of measurements in the center of the measurement region.
Error due to the positional shift of the workpiece in the optical axis direction or scanning direction
Averaging scans between 1 and 8 times can be made if "No extra-fine wire measurement" is specified in the basic setup mode.
The measuring range, however, is limited to 0.1mm to 2mm in this case

Number of Scans	3200/sec
Protection level	IP64
Laser scanning rate	2992in/s 76m/s
Measuring region	.04x.08in 1x2mm
Applicable display unit	LSM-6200
Linearity	.000012in 0.3µm
Measuring Range	.0002-0.08in 0.005-2mm
Part Number	544-532